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Accurate Measurements through the Integration of an Optical Microscope and Advanced Measurement Capability

Observation Performance Refined through Years of Microscope Development

The Olympus STM7 series uses the same UIS2 infinity-corrected optical system used in state-of-the-art optical microscopes. As a result, observed images have high resolution and high contrast, with aberration thoroughly eliminated to help ensure highly accurate measurement in minute detail.

brightfield_image Brightfield image
darkfield_image Darkfield image
differential-interference_image DIC image
polarization_image POL image

Measurement Reliability Enhanced with a Stage-Mounting Plate Crafted from Stone

FEM_analyze STM7-LF FEM analysis

To provide further assurance of measurement accuracy, the STM7 series uses a highly durable, vibration-resistant frame with a granite surface plate. As a result of this stability, measurements can be taken at sub-micron-levels while ensuring minimal error.

Continuing to Provide User-friendly, High-Precision, 3-axis Measurement as a Pioneer of Height Measurement

trace_af_optical_path Reflective Active, Confocal Autofocus System Optical Path

As modern manufacturing technology becomes increasingly miniaturized and precise, highly accurate measurements are even more essential—not only along the horizontal XY axes, but also along the Z-axis. Olympus has responded to such needs by being the fi rst to realize an autofocus system for measuring microscopes by means of the reflective active, confocal method.

Dependable Quality Based On a Strict Traceability System

The accuracy of Olympus’ measuring microscopes is controlled by a strict traceability system and Olympus even offers traceable calibration at the time of installation.


Measuring Microscopes Traceability System

The STM7 was Designed with Emphasis on Ease of Use

Offering Stages to Fit the Sample Size at Hand

Common Problems

  • Short measurement stroke precludes the measurement of larger samples.
  • Sample rotation required to compensate for shorter Y than X-axis coverage during measurement is time inefficient. Until now, large stages have offered a sufficient measurement coverage on the X-axis, but only less coverage on the Y-axis.
  • Due to the narrow measurement range, it is impossible to line up large numbers of samples on the stage for measurement at once.

STM7 Solutions

  • Four types of stages are available, each with a unique square measurement stroke (choose from 50 mm x 50 mm, 100 mm x 100 mm, 200 mm x 200 mm, and 300 mm x 300 mm). From small to large size samples, there is a stage that fits the sample being measured.
  • A clutch system enables rapid switching between coarse and fine movements. Thanks to this switching function, the stage can also be moved rapidly along the X- and Y-axes, and freely across the XY plane.
  • The 300 mm square length stage enables the same measurement stroke to apply to both the X and Y-axes, which means it can be used to measure large samples, such as 300 mm wafers and printed circuit boards without changing their orientation.
stm7_50mm_stage_stmm7-CS50 STM7-CS50
50mm x 50mm
stm7_100mm_stage_stmm7-CS100 STM7-CS100
100mm x 100mm
stm7_50mm_stage_stmm7-CS200 STM7-CS200
200 mm x 200 mm
50mm_stage_stmm7-CS300 STM7-CS300
300 mm x 300 mm

Use the Same Microscope for Both Low- and High-Magnification Observations

Common Problems

  • Most conventional measuring microscopes only accept a measuring objective or metallurgical objective, and so are unable to meet the requirements for a wide variety of observations.

STM7 Solutions

  • The Olympus STM7 accepts both a metallurgical objective and a measuring objective by exchanging a revolving nosepiece with a measuring objective adapter. This means that the STM7 combines both metallurgical optics and measuring optics in one microscope. In this way, the STM7 series satisfi es a range of needs, no matter whether measuring a wide area or tiny region, measuring the size of differences betwe en levels, or assisting the user in deciding on the best observation method to choose.

Measuring Objectives



Because the measuring objectives have an extremely long working distance, they provide confidence when focusing on samples with large peaks and troughs while reducing worries of the objective coming into contact with the sample.
Furthermore, their low-magnifi cation capability enables wide areas to be observed in a single view.

Metallurgical Objectives


Brightfield image


Darkfield image

Metallurgical objectives enable high-magnifi cation, highresolution observation capability comparable to that of optical microscopes. What’s more, these objectives can be used not only for brightfield, but also for darkfield and DIC observation.

> Click here for details about UIS2 objective lenses

Manual and Motorized Focusing Model Options

The STM7 Line Includes both Manual and Motorized Focus Options

Focus control is available with either manual or motorized operation. Choose the model that addresses your needs in terms of samples and measurement content, regardless of stage size—with all frames incorporating a linear scale for the Z-axis that enables 3-axis measurement.

Manual Z-axis Focus Models


Manual Z-axis focus models offer excellent cost performance—with familiar handle operation for rapid vertical movement that offers convenience for users who needs to measure samples with variety of heights.

Motorized Z-axis Focus Models


Operability is improved and handling fatigue is reduced for focus and height measurements when using the motorized focus unit. The coaxial knobs for coarse and fine movement offer a feeling similar to manual operation, while the models can also be equipped with an autofocus unit.

A Revolutionary Control Unit Refines Measuring Microscope Usability

Common Problems

  • Additional functions require additional operational units. Operators can’t always locate the corresponding unit quickly, which significantly reduces measurement efficiency.
  • Numerous operational units and their power supplies around the main unit occupy valuable working space.

STM7 Solutions


With the STM7 series, a single controller makes it possible to perform virtually all measuring microscope operations, including use of readout reset, illumination control, focusing, and autofocus. For effi ciency and convenience, the unit can be placed wherever you wish and operated easily with one hand.

Control Box

hand_swith_for_manual_system For Manual Z-axis Focusing Models:
STM7-HS Hand Switch
control_unit_for_motorized_system For Motorized Z-axis Focusing Models:
STM7-MCZ Focus Controller

The power supply and transmission for each unit are combined in a single control box. This preserves maximal workspace even when a range of optional functions, such as the focus navigator, are added.

Automatic Light Intensity Adjustment Greatly Improves the Efficiency of Observation and Measurement

Common Problems

  • Analog volume adjustment used by conventional measuring microscopes does not enable the quantitative assessment of light intensity, which can lead to variability in measured values as light intensity changes.
  • With conventional measuring microscopes, light intensity may need to be adjusted every time the objective is switched—making for an inefficient workflow.

STM7 Solutions

Close Control through a Quantitative Digital Display of Light Intensity Values

panel_display_for_light_volume The STM7 series provides a quantitative digital display of light intensity—enabling observations to always be made under consistent illumination conditions.

Light Intensity Manager Eliminates the Need for Manual Adjustment

Light intensity manager can be used with the coded revolving nosepiece configuration. The coded revolving nosepiece automatically detects the switching of objectives. This allows the illumination method and light intensity to be registered for each objective, and adjusted automatically during measurements when the objective is switched. Now there is no need to manually adjust light intensity, which used to be required with every switch between magnifications.

light_manager_x5_image 5xIntensity 50stm7_light_manager_x20_image 20xIntensity 70light_manager_x100_image 100xIntensity 120

A Detachable Digital Read Out for Preferred Location Enables Swift, Convenient Checking of Measurement Results and Equipment Status

Common Problems

  • The need to check the operation status of equipment, such as illumination, or measured values on individual units makes overall operation cumbersome.

STM7 Solutions

Digital Indicator Enables the Current Operation Status to be Verified Visually

The indicator displays the device status and settings. The minimum X, Y, and Z-axis values can be switched between 0.1 μm and 1 μm, and the display units can be switched between mm, μm, inches and mil.

Detachable Digital Readout Allows for Individual Preference and Placement

Whether attached to the frame or a desk, the placement of the detachable digital readout is up to the individual user. While standing to take measurements, it can be placed on the side of the frame at almost the same height as the site of observation for an exceptional and easy view. When operating from a sitting position, such as observation or measurements on a monitor via a digital camera or when using the motorized Z-axis focusing model, simply place the digital readout and hand controller on the desk.

panel_display_for_measuremnt_result_with_microscope Digital readout attached to the frame
panel_display_for_measuremnt_result_on_work_desk Digital readout placed on a desk

Automated Focusing System Provides Superior Repeatability

Achieve Faster, Simpler, More Accurate Height Measurement

Common Problems

  • When doing visual measurement, variations can arise in the height measurements between different operators. Furthermore, this measurement method is time-consuming and inefficient.

STM7 Solutions

Simple and Highly-Precise Focusing System with Superior Repeatability

The Olympus’ focus navigator delivers highly reproducible height measurement by projecting a pattern within the fi eld of view and identifying vertical deviations. Slight errors can occur in height measurements taken with normal visual observation, even when focus appears to be sharp. The focus navigator, however, enables measurements to be made simply by matching up the marks—thereby reducing operator subjectivity in measurement results.

Visual Height Measurement

Focus Navigator
focus_navigator_front_focus_area Below Focus

focus_navigator_focus_point In Focus

focus_navigator_rear_focus_area Above Focus

Autofocus Advantage for Fast and Highly Accurate Height Measurement

Common Problems

  • During visual measurement, the results of height measurement can vary between different operators.
  • Manual height measurement requires the operator to repeatedly move the stage and adjust the focus with the handle, making measurement time-consuming and inefficient.
  • Focusing on minute objects, such as bonding wires, is difficult.

STM7 Solutions

Dedicated Autofocus Unit: Outstanding Reproducibility and Focusing Speed

The STM7 dedicated autofocus unit allows highly accurate height measurements to be made with minimal time, regardless of the level of operator experience. Use of the refl ective active, confocal method provides a stable focal point independent of surface roughness or a slanting sample surface, while the small laser diameter enables the use of autofocus, even on minute objects, such as bonding wires.

One-shot Mode


Instantaneously takes autofocus from a roughly focused state to sharp focus located at the center of the fi eld of view.


The featured TRACK Mode provides autofocus that tracks the peaks and troughs of the sample, even if the stage is moved, keeping the image continually in focus. This advancement greatly improves the effi ciency of Z-axis measurements by enabling observations to be made without taking your hands off the X and Y handles.

Accessories that Widen the Range of Observation and Measurement

Coded Revolving Nosepiece


Combining a coded revolving nosepiece with a digital camera lets you display the objective magnification on-screen during observation and allows you to record that magnification.
This convenient feature allows information on your sample and the objective’s magnification to be recorded at the same time when recording a sample.

MM6-EMO/ Erect Image Monocular Tube


Monocular tube for erect images. Can be used in combination with MM6-OCC10x (eyepiece with cross hairs).

STM7-FS/ Foot Switch


Enables hands-free transmission of data, allowing operators to complete measurement without taking hands off the X and Y handles.

SZ-LW61/ White LED Illumination Unit


This light-weight, space-saving design model provides a long operating life and low power consumption. The cost-effective LED illumination unit is also free from the flickering and brightness fluctuation.

SZX2-ILR66+SZX-RHS/ LED Ring Illuminator+Manual Control Unit


SZX-RHS manual control unit enables independent illumination of four-segments of the SZX2-ILR66 reflected LED ring illuminator, which provides clear images with high color temperature. The optimal illumination can be selected from 13 patterns.

Rotatable Stage

Enables easy parallel alignment of sample.

rotatable_stage_STM7_RS100 STM7-RS100
for STM7-CS100 100 mm x 100 mm stage

STM7 Specifications

Small frameMiddle frameLarge frame
Optical SystemUIS2 Optical System (Infinity-corrected)
Microscope FrameObservation MethodBF/DF/DIC/KPO*1
Illumination SystemWhite: for Reflected Illumination, Green: for Transmitted Illumination with Max. Power Consumption: 10 W
FocusMotorized/ManualManual  [Manual Type]
Motorized [Motorized Type]
Stroke175 mm145 mm*2
FOCUS button: Coarse movement speed8 mm/sec [Motorized Type]
Fine Focasing Speed (Variable)800 µm/400 µm/200 µm/50 µm (Full Rotation of Knob) 4 Steps [Motorized Type]
Maximum measurable height175 mm*3, 120 mm*4145 mm*3, 90 mm*4
ObjectivesMeasuring Objectives/Metallurgical Objectives
Observation tubeErect image monocular tube, erect image trinocular tube (100:0/0:100)
Measuring Accuracy50 mm Stroke:(3+L/50)µm(3+4L/200)µm(3+6L/300)µm
100 mm Stroke:(3+2L/100)µm
Counter DisplayNumber of axesThree
Minimum resolution0.1μm
Dimensions[Manual Type]466(W)x583(D)x651(H)mm606(W)x762(D)x651(H)mm804(W)x1024(D)x686(H)mm
[Motorized Type]466(W)x583(D)x811(H)mm606(W)x762(D)x811(H)mm804(W)x1024(D)x844(H)mm
Weight[Manual Type]84kg(Approx.)152kg(Approx.)277kg(Approx.)
[Motorized Type]92kg(Approx.)159kg(Approx.)284kg(Approx.)
Remark*1: Simple Polarized Light Observation
*2: When using the large frame STM7-LF/STM7-LFA, a specimen whose height is 100 mm or less can be placed at the position backward from the light axis by 180 mm or more.
*3: With Objective Lenses for Metallurgical Microscope
*4: With Objective Lenses for Measuring Microscope
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