The workpiece is loaded and moved in an X/Y direction and the quantity of the movement is read.
Used in combination with a stage when rotating a workpiece. These tables are used to rotate the workpiece and align it in the direction to which the stage moves.
For use with the PS 4x4B, PS 6x4B stages.
For use with the PS 12x8C, PS 10x6B, PS 8x6B stages.
Prints out XY counter values when connected to the SC-213/212 counters.
This scale can gauge the travel precision of a stage up to 300mm.
This comes with both 10mm-step patterns and ordinary calibrations. It employs low expansive glass to curtain the influence from heat.
Accuracy: within 1μm against the corrected value (provided with accuracy table)
Ideal for managing result data that contain maximum/minimum values, widths allowances, standard deviations, process capability indices, lot by lot
OS: Windows® 7 or Windows® 10 ; Memory space: 512MB or more